Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics - Département de physique Accéder directement au contenu
Article Dans Une Revue Journal of Applied Physics Année : 2001

Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics

Résumé

We present a simple technique for determining the absolute fluorine atom concentration in pure CF4 capacitively coupled radio-frequency discharges. It is based on the measurement, by laser-induced fluorescence, of the loss rate kloss of the CF2 radical in the afterglow of a pulsed plasma. We first demonstrate that in our conditions, CF2 is lost only by gas phase recombination with F atoms (with a known rate constant krec) and by recombination at the reactor walls at a rate kwall, independent of the rf power injected. Hence, the total CF2 loss rate, kloss=kwall+krec[F], varies linearly with [F] when the rf power is increased. By recording kloss and the relative variation of the F atom concentration (by optical emission actinometry) as a function of rf power, kwall and [F] can be determined. These measurements of [F] complement previous quantitative measurements of CF and CF2 radicals [Booth et al., J. Appl. Phys. 85, 3097 (1999); and Cunge and Booth, J. Appl. Phys. 85, 3952 (1999)] made in the same reactor for the same plasma conditions.
Fichier principal
Vignette du fichier
Cunge2001.pdf (119.73 Ko) Télécharger le fichier
Origine Fichiers éditeurs autorisés sur une archive ouverte

Dates et versions

hal-00475790 , version 1 (28-02-2024)

Identifiants

Citer

Gilles Cunge, Pascal Chabert, Jean-Paul Booth. Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics. Journal of Applied Physics, 2001, 89 (12), pp.7750. ⟨10.1063/1.1371940⟩. ⟨hal-00475790⟩
204 Consultations
22 Téléchargements

Altmetric

Partager

Gmail Mastodon Facebook X LinkedIn More