A 2D nano-positioning system with a sub-nanometric repeatability over millimetre displacement range - Université de Versailles Saint-Quentin-en-Yvelines Access content directly
Journal Articles Measurement Science and Technology Year : 2007

A 2D nano-positioning system with a sub-nanometric repeatability over millimetre displacement range

Abstract

We propose a 2D displacement control system with a sub-nanometric repeatability on position over millimetre travel range on both axes. It could be useful for nanofabrication processes or other applications related to the nanotechnology community. In our case, the apparatus is planned to be used in atomic force microscopes and lithography systems as sample-holding device. The method is based on a heterodyne interferometric sensor and a home-made high frequency phase-shifting electronic board. This paper presents the complete mechanical system and gives experimental results showing repeatability of 0.5 nm over a dynamic range of 5 mm.
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Dates and versions

hal-01205413 , version 1 (25-09-2015)

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Luc Chassagne, Marwan Wakim, Suan Xu, Suat Topsu, Pascal Ruaux, et al.. A 2D nano-positioning system with a sub-nanometric repeatability over millimetre displacement range. Measurement Science and Technology, 2007, 18 (11), pp.3267-3272. ⟨10.1088/0957-0233/18/11/001⟩. ⟨hal-01205413⟩
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