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2D nano-positioning system with a sub-nanometric repeatability over millimetre displacement range

Abstract : We propose a 2D displacement control system with a sub-nanometric repeatability on position over millimetre travel range on both axes. It could be useful for nanofabrication processes or other applications related to the nanotechnology community. In our case, the apparatus is planned to be used in atomic force microscopes and lithography systems as sample-holding device. The method is based on a heterodyne interferometric sensor and a home-made high frequency phase-shifting electronic board. This paper presents the complete mechanical system and gives experimental results showing repeatability of 0.5 nm over a dynamic range of 5 mm.
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https://hal.uvsq.fr/hal-01205413
Contributor : Luc Chassagne <>
Submitted on : Friday, September 25, 2015 - 2:33:37 PM
Last modification on : Friday, March 6, 2020 - 11:46:10 AM
Long-term archiving on: : Tuesday, December 29, 2015 - 10:02:54 AM

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Luc Chassagne, Marwan Wakim, Suan Xu, Suat Topsu, Pascal Ruaux, et al.. 2D nano-positioning system with a sub-nanometric repeatability over millimetre displacement range. Measurement Science and Technology, IOP Publishing, 2007. ⟨hal-01205413⟩

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